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We summarized the current enhancement standing from the superior-electricity DUV laser each within the wavelength of FHG in the one-μm laser and at 193 nm. The latest improvement from the solid-point out/fiber laser, and also the nonlinear optical crystals, prompts not only the standard electricity but additionally the beam top quality (coherence) on the DUV lasers to an unparalleled amount.
For instance, The existing concave OC could be replaced by a plane mirror which could mitigate the facility density about the area of M1 as well as diamond. What's more, working with high hurt threshold coatings for M1 and diamond would also improve the output ability with no damages. Then, the NIR laser at the 2nd Stokes wavelength may be higher plenty of, along with its very good beam high-quality, to create the ultimate DUV laser at 193 nm having a large normal energy.
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A result of the thermal lens result within the solid-condition lasers, In the event the heating administration is inadequate, It isn't easy to get the strong-point out laser by using a higher electric power as well as a superior beam good quality simultaneously. Not long ago, with more info the event of the thin disk laser and solitary-crystal fiber (SCF) laser, a significant-energy laser at the basic wavelength (one μm) were understood with a good beam top quality In spite of a TEM00 method beam [four,24], which might be fantastic candidates for the elemental on the DUV laser generation. A different applicant for the basic is definitely the substantial-power fiber laser which could possibly be achieved by coherent beam mix with M2 worth lower than 1.
On another facet, the ability scaling of the NIR laser is yet another aspect to improve the typical energy on the 193-nm DUV laser. A result of the deficiency of the superior-power amplification solution in the NIR laser (such as at 1553 nm), nonlinear frequency processes such as optical parameter oscillation (OPO) may be placed on produce a wavelength converter by shifting the wavelength from 1 μm to the specified wavelength and getting relative increased electrical power [21]. A short while ago, a diamond Raman laser showed its potential in acquiring a high energy as well as a substantial conversion efficiency for the 1st Stokes of your 1-μm laser [22,23], which implies the chance to become utilized within the 193-nm DUV laser era on account of its significant Raman achieve and huge frequency shift.
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The heart beat duration of the next Stokes gentle was shortened to five ns as demonstrated in Determine 7a, one-shot photo through the oscilloscope, that's a typical phenomenon in Raman laser [44] when the pulse length from the pump laser was ten ns.
What's more, combining the stable-condition laser with other nonlinear procedure including stimulated Raman scattering, NIR lasers can be realized at new wavelengths with high electricity and substantial beam high-quality, which was examined because of the evidence-of-theory experiment. This Raman laser plan offers a brand new route to the superior-energy DUV laser, Specifically with the wavelength of 193 nm.
Tunable ultraviolet laser resource based on strong-point out dye laser technology and CsLiB6O10 harmonic technology
Its UV absorption edge reaches a hundred and eighty nm. The helpful nonlinear optical coefficient of CLBO for frequency doubling at 1064nm is about 2 times as huge as that of KDP. CLBO crystals may be developed through the stoichiometric melt with lessen viscosity.
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